Inventor
YAO KENNETH H
US4 patents
Patents
4 patentsUS6776171B2Aug 17, 2004
Cleaning of semiconductor wafers by contaminate encapsulation
IBM43 citations88
US6340601B1Jan 22, 2002
Method for reworking copper metallurgy in semiconductor devices
IBM26 citations87
US6939408B1Sep 6, 2005
Method for surface preparation of workpieces utilizing fluid separation techniques
IBM3 citations55
US7531059B2May 12, 2009
Cleaning of semiconductor wafers by contaminate encapsulation
IBM0 citations48