Inventor
MORIKAWA MICHITAKA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MORIKAWA MICHITAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
3 patentsFUJITSU LTD
2 patentsUS6949324B2Sep 27, 2005
Alkali-soluble siloxane polymer, positive type resist composition, resist pattern, process for forming the same, electronic device and process for manufacturing the same
FUJITSU LTD7 citations72
US7439010B2Oct 21, 2008
Alkali-soluble siloxane polymer, positive type resist composition, resist pattern, process for forming the same, electronic device and process for manufacturing the same
FUJITSU LTD2 citations61