Inventor
ILLING MATTHIAS
US12 patents
⚠️ This page may combine multiple inventors who share the name “ILLING MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
6 patentsUS6360605B1Mar 26, 2002
Micromechanical device
BOSCH GMBH ROBERT73 citations94
US7354786B2Apr 8, 2008
Sensor element with trenched cavity
BOSCH GMBH ROBERT27 citations91
US6989609B2Jan 24, 2006
Method and apparatus for supplying energy to sensors
BOSCH GMBH ROBERT6 citations73
US6739193B2May 25, 2004
Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same
BOSCH GMBH ROBERT5 citations62
US7863072B2Jan 4, 2011
Micromechanical diaphragm sensor having a double diaphragm
BOSCH GMBH ROBERT1 citations51
US7572661B2Aug 11, 2009
Method for manufacturing a micromechanical sensor element
BOSCH GMBH ROBERT0 citations40
LAMMEL GERHARD
2 patentsUS8492850B2Jul 23, 2013
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
LAMMEL GERHARD0 citations51
US8148234B2Apr 3, 2012
Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure
LAMMEL GERHARD0 citations51