Inventor
FEIL MICHAEL
DE9 patents
⚠️ This page may combine multiple inventors who share the name “FEIL MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
3 patentsUS6756288B1Jun 29, 2004
Method of subdividing a wafer
FRAUNHOFER GES FORSCHUNG33 citations91
US6444493B1Sep 3, 2002
Method for vertically integrating active circuit planes and vertically integrated circuit produced using said method
FRAUNHOFER GES FORSCHUNG13 citations72
US6365440B1Apr 2, 2002
Method for contacting a circuit chip
FRAUNHOFER GES FORSCHUNG10 citations71