Inventor

LACEY JOSEPH DAMIAN GORDON

US7 patents

⚠️ This page may combine multiple inventors who share the name “LACEY JOSEPH DAMIAN GORDON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LACEY JOSEPH DAMIAN GORDON

2 patents

US8124527B2Feb 28, 2012

CMP process flow for MEMS

LACEY JOSEPH DAMIAN GORDON3 citations57

US8957485B2Feb 17, 2015

Fabrication of MEMS based cantilever switches by employing a split layer cantilever deposition scheme

LACEY JOSEPH DAMIAN GORDON2 citations55

CAVENDISH KINETICS INC

2 patents

US8921953B2Dec 30, 2014

Method for MEMS device fabrication and device formed

CAVENDISH KINETICS INC0 citations49

US9487395B2Nov 8, 2016

Method of forming planar sacrificial material in a MEMS device

CAVENDISH KINETICS INC1 citations45

CAVENDISH KINETICS LTD

1 patent

US7993950B2Aug 9, 2011

System and method of encapsulation

CAVENDISH KINETICS LTD5 citations58

RENAULT MICKAEL

1 patent

US8513043B2Aug 20, 2013

Method for MEMS device fabrication and device formed

RENAULT MICKAEL0 citations44

TROY BRIAN I

1 patent

US8921165B2Dec 30, 2014

Elimination of silicon residues from MEMS cavity floor

TROY BRIAN I0 citations38