Inventor
FU YALI
CN2 patents
Patents
2 patentsUS10170285B2Jan 1, 2019
Method of operating semiconductor manufacturing apparatus and semiconductor devices
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations48
US9899194B2Feb 20, 2018
Apparatus for plasma treatment and method of operating the apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations48