Inventor

MOSLEHI MEHRDAD M

US221 patents

⚠️ This page may combine multiple inventors who share the name “MOSLEHI MEHRDAD M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOSLEHI MEHRDAD M

TEXAS INSTRUMENTS INC

Apparatus for semiconductor device fabrication diagnosis and prognosis

Real-time multi-zone semiconductor wafer temperature and process uniformity control system

Multi-electrode plasma processing apparatus

Programmable multizone gas injector for single-wafer semiconductor processing equipment

High performance multi-zone illuminator module for semiconductor wafer processing

Real-time multi-zone semiconductor wafer temperature and process uniformity control system

Low-temperature in-situ dry cleaning process for semiconductor wafer

Source and method for generating high-density plasma with inductive power coupling

Sensor for semiconductor device manufacturing process control

Method and apparatus for time-division plasma chopping in a multi-channel plasma processing equipment

Method and apparatus for semiconductor device fabrication diagnosis and prognosis

Multi zone illuminator with embeded process control sensors and light interference elimination circuit

Multi-zone plasma processing method and apparatus

Apparatus and method for in-situ deep ultraviolet photon-assisted semiconductor wafer processing

Multipurpose low-thermal-mass chuck for semiconductor processing equipment

Method of fabricating an high-performance insulated-gate field-effect transistor

SOI/semiconductor heterostructure fabrication by wafer bonding of polysilicon to titanium

Low-temperature in-situ dry cleaning process for semiconductor wafers

Plasma density controller for semiconductor device processing equipment

Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors

Insulated-gate field-effect transistor structure and method

High-performance insulated-gate field-effect transistor

Apparatus and method for determining wafer temperature using pyrometry

Semiconductor wafer cleaning using condensed-phase processing

Multi-point pyrometry with real-time surface emissivity compensation

Plasma-assisted processing magneton with magnetic field adjustment

Distributed ECR remote plasma processing and apparatus

CVC PRODUCTS INC

Apparatus for inductively-coupled-plasma-enhanced ionized physical-vapor deposition

Apparatus for supporting a substrate in a reaction chamber

Method of chemical-vapor deposition of a material

Semiconductor chip interconnect barrier material and fabrication method

Hermetically-sealed inductively-coupled plasma source structure and method of use

Method and system for dispensing process gas for fabricating a device on a substrate

Shutter for thin-film processing equipment

Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing

Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment

Multi-zone illuminator for rapid thermal processing

Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure

Microelectronic interconnect material with adhesion promotion layer and fabrication method

Method for fabricating a semiconductor chip interconnect

High-performance energy transfer method for thermal processing applications

Method for planarized deposition of a material

CVC INC

Ultra high-speed chip interconnect using free-space dielectrics

Ultra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectrics

Method for multi-zone high-density inductively-coupled plasma generation

VEECO CVC INC

Segmented-target ionized physical-vapor deposition apparatus and method of operation

Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and system

(unassigned)

Hermetically-sealed inductively-coupled plasma source structure and method of use

UNIV LELAND STANFORD JUNIOR

Thermal/microwave remote plasma multiprocessing reactor and method of use

WANG DAVID XUAN-QI

High-efficiency thin-film solar cells