Inventor
KOSUGI MASAO
JP36 patents
⚠️ This page may combine multiple inventors who share the name “KOSUGI MASAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
34 patentsUS4814829AMar 21, 1989
Projection exposure apparatus
CANON KK162 citations98
US4776462AOct 11, 1988
Container for a sheet-like article
CANON KK64 citations96
US4937618AJun 26, 1990
Alignment and exposure apparatus and method for manufacture of integrated circuits
CANON KK57 citations95
US4786947ANov 22, 1988
Projection exposure apparatus
CANON KK115 citations94
US5262822ANov 16, 1993
Exposure method and apparatus
CANON KK30 citations93
US5160957ANov 3, 1992
Alignment and exposure apparatus
CANON KK52 citations93
US4888614ADec 19, 1989
Observation system for a projection exposure apparatus
CANON KK24 citations93
US4843563AJun 27, 1989
Step-and-repeat alignment and exposure method and apparatus
CANON KK29 citations93
US4488806ADec 18, 1984
Shot arranging method in a divisional printing apparatus
CANON KK31 citations93
US6144504ANov 7, 2000
Projection and exposure apparatus including an optical member and a holding member
CANON KK25 citations92
US5365342ANov 15, 1994
Alignment and exposure apparatus and method for manufacture of integrated circuits
CANON KK28 citations92
US5137363AAug 11, 1992
Projection exposure apparatus
CANON KK37 citations92
US5053670AOct 1, 1991
Precision actuator
CANON KK47 citations92
US5050111ASep 17, 1991
Alignment and exposure apparatus and method for manufacture of integrated circuits
CANON KK31 citations92
US4823012AApr 18, 1989
Step and repeat exposure apparatus having improved system for aligning
CANON KK31 citations92
US4775877AOct 4, 1988
Method and apparatus for processing a plate-like workpiece
CANON KK34 citations92
US4757355AJul 12, 1988
Mask storing mechanism
CANON KK27 citations92
US4676631AJun 30, 1987
Device for adjusting projection magnification
CANON KK36 citations92
US4506977AMar 26, 1985
Transfer apparatus provided with an auto-focusing mechanism
CANON KK33 citations92
US4441853AApr 10, 1984
Disc orienting device
CANON KK32 citations92
US4910679AMar 20, 1990
Step-and-repeat alignment and exposure method and apparatus
CANON KK17 citations82
US4719357AJan 12, 1988
Semiconductor circuit manufacturing apparatus having selectively operable detectors for effecting automatic alignment
CANON KK20 citations80
US4521082AJun 4, 1985
Exposure apparatus
CANON KK26 citations79
US5386269AJan 31, 1995
Alignment and exposure apparatus
CANON KK14 citations74
US5120134AJun 9, 1992
Exposure system including a device for analyzing an affect of a wafer resist upon a mark signal
CANON KK17 citations74
US4648708AMar 10, 1987
Pattern transfer apparatus
CANON KK10 citations74
US4627010ADec 2, 1986
Method and device for discriminating stillness of a step exposure apparatus
CANON KK13 citations74
US4617469AOct 14, 1986
Exposure apparatus with detecting means insertable into an exposure path
CANON KK17 citations74
US4179110ADec 18, 1979
Method for opposing a sheet-like material to a standard plane with predetermined space therebetween
CANON KK13 citations73
US4530587AJul 23, 1985
Step type mask aligner
CANON KK13 citations72
US5999270ADec 7, 1999
Projection exposure apparatus and microdevice manufacturing method using the same
CANON KK3 citations63
US4682037AJul 21, 1987
Projection exposure apparatus having an alignment light of a wavelength other than that of the exposure light
CANON KK5 citations63
US4271577AJun 9, 1981
Alignment device
CANON KK4 citations63
US4479711AOct 30, 1984
Mask aligner
CANON KK3 citations62