Inventor

INA HIDEKI

JP114 patents

⚠️ This page may combine multiple inventors who share the name “INA HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INA HIDEKI

CANON KK

Projection exposure apparatus

Alignment method and exposure apparatus using the same

Exposure apparatus and method

Position detection apparatus and method

Projection exposure apparatus

Alignment and exposure apparatus

Alignment method and a projection exposure apparatus using the same

Alignment method and pattern forming method using the same

Alignment of an object

Alignment and exposure apparatus

Mold, pattern forming method, and pattern forming apparatus

Mold, imprint method, and process for producing chip

Position detecting device and position detecting method

Management system, apparatus, and method, exposure apparatus, and control method therefor

Position detecting method and apparatus, exposure apparatus and device manufacturing method

Position detecting system and exposure apparatus using the same

Management system and apparatus, method therefor, and device manufacturing method

Position measuring method and position measuring system using the same

Method of evaluating imaging performance

Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory

Position detecting method and position detecting device for detecting relative positions of objects having position detecting marks by using separate reference member having alignment marks

Position detecting method and position detecting system

Projection exposure apparatus

Alignment and exposure apparatus

Device for observing alignment marks on a mask and wafer

Detection optical system for detecting a pattern on an object

Alignment signal detecting device

Observation system for a projection exposure apparatus

Mark detecting device for detecting the center of a mark by detecting its edges

Apparatus for inspecting negatives

Observation apparatus with selective light diffusion

Optical apparatus using polarized light

Dust particle inspection apparatus, and device manufacturing method using the same

Apparatus and method for exposing a pattern on a ball-like device material

Projection exposure apparatus

Projection exposure apparatus

Method and apparatus for alignment

Alignment system and alignment method in exposure apparatus

Illumination method and system having a first optical element at a position optically conjugate with an object and a second optical element closer to the object and on a pupil plane of the system

Information providing method and system

Interferometer, lithography apparatus, and method of manufacturing article

Pattern transfer apparatus, imprint apparatus, and pattern transfer method

Method and program for calculating exposure dose and focus position in exposure apparatus, and device manufacturing method

Imprint apparatus and imprint method including dual movable image pick-up device

Position detecting method and apparatus

Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices

Position detecting method and apparatus, exposure apparatus and device manufacturing method

Position detecting device and position detecting method

SUEHIRA NOBUHITO

Light transmissive mold and apparatus for imprinting a pattern onto a material applied on a semiconductor workpiece and related methods

Alignment method, imprint method, alignment apparatus, and position measurement method