Inventor
STEPANOV ANDREY EVGENIEVICH
RU6 patents
Patents
6 patentsUS11978620B2May 7, 2024
Swirler for laser-sustained plasma light source with reverse vortex flow
KLA CORP2 citations70
US11690162B2Jun 27, 2023
Laser-sustained plasma light source with gas vortex flow
KLA CORP4 citations69
US11776804B2Oct 3, 2023
Laser-sustained plasma light source with reverse vortex flow
KLA CORP4 citations68
US11596048B2Feb 28, 2023
Rotating lamp for laser-sustained plasma illumination source
KLA CORP0 citations56
US11635700B2Apr 25, 2023
Method and apparatus for EUV mask inspection
KLA CORP0 citations46
US12538408B2Jan 27, 2026
Laser-sustained plasma generation in supersonic gas jets
KLA CORP0 citations42