Inventor
POTAPKIN BORIS VASILYEVICH
RU3 patents
Patents
3 patentsUS11690162B2Jun 27, 2023
Laser-sustained plasma light source with gas vortex flow
KLA CORP4 citations69
US11776804B2Oct 3, 2023
Laser-sustained plasma light source with reverse vortex flow
KLA CORP4 citations68
US11596048B2Feb 28, 2023
Rotating lamp for laser-sustained plasma illumination source
KLA CORP0 citations56