Inventor

ZHONG XIAOLAN

CN2 patents

Patents

2 patents

US12002708B2Jun 4, 2024

Method for forming intermetallic air gap

SHANGHAI IC R&D CT CO LTD0 citations50

US11769679B2Sep 26, 2023

Apparatus and method for improving film thickness uniformity

SHANGHAI IC R&D CT CO LTD0 citations43