Inventor
REICH ALFRED J
US6 patents
Patents
6 patentsUS5900340AMay 4, 1999
One dimensional lithographic proximity correction using DRC shape functions
MOTOROLA INC269 citations98
US5849440ADec 15, 1998
Process for producing and inspecting a lithographic reticle and fabricating semiconductor devices using same
MOTOROLA INC94 citations97
US5920487AJul 6, 1999
Two dimensional lithographic proximity correction using DRC shape functions
MOTOROLA INC70 citations94
US5827625AOct 27, 1998
Methods of designing a reticle and forming a semiconductor device therewith
MOTOROLA INC45 citations91
US6593226B2Jul 15, 2003
Method for adding features to a design layout and process for designing a mask
MOTOROLA INC34 citations90
US6605395B2Aug 12, 2003
Method and apparatus for forming a pattern on an integrated circuit using differing exposure characteristics
MOTOROLA INC11 citations71