P

Inventor

SUZUKI FUJIO

JP56 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI FUJIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

13 patents
US5593608AJan 14, 1997

Temperature control method and apparatus for use in thermal processing equipment

TOKYO ELECTRON LTD47 citations93
US5409348AApr 25, 1995

Substrate transfer method

TOKYO ELECTRON LTD47 citations93
US7138607B2Nov 21, 2006

Determining method of thermal processing condition

TOKYO ELECTRON LTD30 citations92
US6803548B2Oct 12, 2004

Batch-type heat treatment apparatus and control method for the batch-type heat treatment apparatus

TOKYO ELECTRON LTD36 citations92
US6787377B2Sep 7, 2004

Determining method of thermal processing condition

TOKYO ELECTRON LTD16 citations92
US6730885B2May 4, 2004

Batch type heat treatment system, method for controlling same, and heat treatment method

TOKYO ELECTRON LTD23 citations92
US6622104B2Sep 16, 2003

Heat treatment apparatus, calibration method for temperature measuring system of the apparatus, and heat treatment system

TOKYO ELECTRON LTD41 citations92
US6329643B1Dec 11, 2001

Method of temperature-calibrating heat treating apparatus

TOKYO ELECTRON LTD28 citations92
US6922522B2Jul 26, 2005

Heat treatment apparatus, calibration method for temperature measuring system of the apparatus, and heat treatment system

TOKYO ELECTRON LTD15 citations84
US6780795B2Aug 24, 2004

Heat treatment apparatus for preventing an initial temperature drop when consecutively processing a plurality of objects

TOKYO ELECTRON LTD14 citations81
US6495805B2Dec 17, 2002

Method of determining set temperature trajectory for heat treatment system

TOKYO ELECTRON LTD12 citations73
US6351105B2Feb 26, 2002

Power controlling unit and thermal processing unit

TOKYO ELECTRON LTD6 citations63
US6847015B2Jan 25, 2005

Heat treatment apparatus and controller for heat treatment apparatus and control method for heat treatment apparatus

TOKYO ELECTRON LTD2 citations62

VICTOR COMPANY OF JAPAN

8 patents

KUREHA CHEMICAL IND CO LTD

7 patents

SANYO ELECTRIC CO

6 patents

TEL SAGAMI LTD

2 patents

TOYODA CHUO KENKYUSHO KK

2 patents

SUZUKI FUJIO

2 patents

ASAI GERMANIUM RES INST

2 patents

MITSUBISHI CHEM CORP

1 patent

TOYODA AUTOMATIC LOOM WORKS

1 patent

KIRIN BREWERY

1 patent

KIRIN SEAGRAM LTD

1 patent

NEC CORP

1 patent

MAEDA HIROSHI

1 patent

ZERIA PHARM CO LTD

1 patent

MITSUBISHI CHEM IND

1 patent

Showing the top 50 of 56 patents by PatentIndex Score.