Inventor
OGATA AKIRA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “OGATA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
7 patentsUS6517689B1Feb 11, 2003
Plating device
EBARA CORP57 citations95
US6042454AMar 28, 2000
System for detecting the endpoint of the polishing of a semiconductor wafer by a semiconductor wafer polisher
EBARA CORP28 citations91
US6102786AAug 15, 2000
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP12 citations73
US5888126AMar 30, 1999
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP15 citations73
US6500317B1Dec 31, 2002
Plating apparatus for detecting the conductivity between plating contacts on a substrate
EBARA CORP8 citations72
US7341634B2Mar 11, 2008
Apparatus for and method of processing substrate
EBARA CORP4 citations62
USRE39262ESep 5, 2006
Polishing apparatus including turntable with polishing surface of different heights
EBARA CORP0 citations41