Inventor
ICHIMURA TERUHIKO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “ICHIMURA TERUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
6 patentsUS7311585B2Dec 25, 2007
Substrate holding apparatus and polishing apparatus
EBARA CORP15 citations92
US7033260B2Apr 25, 2006
Substrate holding device and polishing device
EBARA CORP20 citations92
US6425809B1Jul 30, 2002
Polishing apparatus
EBARA CORP35 citations92
US6435956B1Aug 20, 2002
Wafer holder and polishing device
EBARA CORP25 citations89
US7632173B2Dec 15, 2009
Substrate holding apparatus and polishing apparatus
EBARA CORP11 citations84
US7163895B2Jan 16, 2007
Polishing method
EBARA CORP9 citations74
FUJITSU LTD
5 patentsUS5480818AJan 2, 1996
Method for forming a film and method for manufacturing a thin film transistor
FUJITSU LTD856 citations98
US5496752AMar 5, 1996
Method of manufacturing thin film transistors in a liquid crystal display apparatus
FUJITSU LTD76 citations95
US5407845AApr 18, 1995
Method of manufacturing thin film transistors in a liquid crystal display apparatus
FUJITSU LTD56 citations95
US5496749AMar 5, 1996
Method of manufacturing thin film transistors in a liquid crystal display apparatus
FUJITSU LTD17 citations81
US5462885AOct 31, 1995
Method of manufacturing thin film transistors in a liquid crystal display apparatus
FUJITSU LTD16 citations81