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Inventor
RUBEN KIMBERLY A
US
2 patents
Patents
2 patents
US7316844B2
Jan 8, 2008
Spin-on protective coatings for wet-etch processing of microelectronic substrates
BREWER SCIENCE INC
17 citations
89
US7758913B2
Jul 20, 2010
Spin-on protective coatings for wet-etch processing of microelectronic substrates
BREWER SCIENCE INC
2 citations
59