Inventor
VON HODENBERG MARTIN
DE9 patents
Patents
9 patentsUS9170497B2Oct 27, 2015
Projection exposure apparatus with at least one manipulator
ZEISS CARL SMT GMBH7 citations83
US10303063B2May 28, 2019
Projection exposure apparatus with at least one manipulator
ZEISS CARL SMT GMBH1 citations72
US10018907B2Jul 10, 2018
Method of operating a microlithographic projection apparatus
ZEISS CARL SMT GMBH2 citations72
US9134613B2Sep 15, 2015
Illumination and displacement device for a projection exposure apparatus
ZEISS CARL SMT GMBH3 citations59
US9817316B2Nov 14, 2017
Projection exposure method and projection exposure apparatus for microlithography
ZEISS CARL SMT GMBH1 citations51
US9348234B2May 24, 2016
Microlithographic apparatus
ZEISS CARL SMT GMBH1 citations50
US9829800B2Nov 28, 2017
System correction from long timescales
ZEISS CARL SMT GMBH0 citations49
US9372411B2Jun 21, 2016
Projection objective of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations48
US9606446B2Mar 28, 2017
Reflective optical element for EUV lithography and method of manufacturing a reflective optical element
ZEISS CARL SMT GMBH0 citations40