Inventor
Shen En-Chao
TW3 patents
Patents
3 patentsUS10157741B1Dec 18, 2018
Method of manufacturing a semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations69
US9992856B2Jun 5, 2018
Solution for EUV power increment at wafer level
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations64
US9451683B1Sep 20, 2016
Solution for EUV power increment at wafer level
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations54