Inventor
KENWORTHY IAN
US10 patents
⚠️ This page may combine multiple inventors who share the name “KENWORTHY IAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS10665435B2May 26, 2020
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10395902B2Aug 27, 2019
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10049862B2Aug 14, 2018
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP4 citations72
US10985078B2Apr 20, 2021
Sensor and adjuster for a consumable
LAM RES CORP2 citations71
US9922804B2Mar 20, 2018
Compression member for use in showerhead electrode assembly
LAM RES CORP1 citations60
US10332729B2Jun 25, 2019
Compression member for use in showerhead electrode assembly
LAM RES CORP0 citations50
US9689533B2Jun 27, 2017
Coating method for gas delivery system
LAM RES CORP0 citations49