Inventor
LEMBESIS PETER J
US4 patents
Patents
4 patentsUS11508560B2Nov 22, 2022
Focus ring adjustment assembly of a system for processing workpieces under vacuum
MATTSON TECH INC2 citations69
US11348767B2May 31, 2022
Plasma processing apparatus having a focus ring adjustment assembly
MATTSON TECH INC4 citations69
US11515127B2Nov 29, 2022
End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum
MATTSON TECH INC0 citations58
US11195718B2Dec 7, 2021
Spacer open process by dual plasma
MATTSON TECH INC0 citations49