Inventor
PAKULSKI RYAN M
US4 patents
⚠️ This page may combine multiple inventors who share the name “PAKULSKI RYAN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
3 patentsUS11508560B2Nov 22, 2022
Focus ring adjustment assembly of a system for processing workpieces under vacuum
MATTSON TECH INC2 citations69
US11348767B2May 31, 2022
Plasma processing apparatus having a focus ring adjustment assembly
MATTSON TECH INC4 citations69
US11515127B2Nov 29, 2022
End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum
MATTSON TECH INC0 citations58