Inventor
WANG CHING-BORE
US8 patents
⚠️ This page may combine multiple inventors who share the name “WANG CHING-BORE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRO LITHOGRAPHY INC
7 patentsUS6594073B2Jul 15, 2003
Antistatic optical pellicle
MICRO LITHOGRAPHY INC20 citations90
US6566021B2May 20, 2003
Fluoropolymer-coated photomasks for photolithography
MICRO LITHOGRAPHY INC27 citations90
US6190743B1Feb 20, 2001
Photomask protection system
MICRO LITHOGRAPHY INC23 citations90
US5820950AOct 13, 1998
Optical pellicle and package
MICRO LITHOGRAPHY INC24 citations90
US5453816ASep 26, 1995
Protective mask for pellicle
MICRO LITHOGRAPHY INC33 citations90
US6573980B2Jun 3, 2003
Removable optical pellicle
MICRO LITHOGRAPHY INC13 citations82
US8968971B2Mar 3, 2015
Pellicles with reduced particulates
MICRO LITHOGRAPHY INC4 citations71