P

Inventor

WARENBACK DOUGLAS H

US4 patents
⚠️ This page may combine multiple inventors who share the name “WARENBACK DOUGLAS H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEGAL CORP

3 patents
US4780169AOct 25, 1988

Non-uniform gas inlet for dry etching apparatus

TEGAL CORP625 citations96
US4547247AOct 15, 1985

Plasma reactor chuck assembly

TEGAL CORP44 citations89
US4867631ASep 19, 1989

Spatula for wafer transport

TEGAL CORP5 citations60

WARENBACK DOUGLAS H

1 patent
US4984954AJan 15, 1991

Spatula for wafer transport

WARENBACK DOUGLAS H2 citations54