Inventor

RATHMANN THOMAS M

US3 patents

Patents

3 patents

US4801241AJan 31, 1989

Modular article processing machine and method of article handling therein

TEGAL CORP42 citations91

US4547247AOct 15, 1985

Plasma reactor chuck assembly

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US4619573AOct 28, 1986

Article transport apparatus

TEGAL CORP32 citations88