Inventor
MIRKOVICH NINKO T
US6 patents
Patents
6 patentsUS4632624ADec 30, 1986
Vacuum load lock apparatus
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US4727993AMar 1, 1988
Wafer cassette having multi-directional access
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US4861222AAug 29, 1989
Cassette elevator for use in a modular article processing machine
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US4801241AJan 31, 1989
Modular article processing machine and method of article handling therein
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US4547247AOct 15, 1985
Plasma reactor chuck assembly
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US4619573AOct 28, 1986
Article transport apparatus
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