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Inventor
GOTUACO MARGARET LYNN
US
2 patents
Patents
2 patents
US6472333B2
Oct 29, 2002
Silicon carbide cap layers for low dielectric constant silicon oxide layers
APPLIED MATERIALS INC
26 citations
91
US6750141B2
Jun 15, 2004
Silicon carbide cap layers for low dielectric constant silicon oxide layers
APPLIED MATERIALS INC
1 citations
51