Inventor
URDAHL RANDALL S
US6 patents
⚠️ This page may combine multiple inventors who share the name “URDAHL RANDALL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6387761B1May 14, 2002
Anneal for enhancing the electrical characteristic of semiconductor devices
APPLIED MATERIALS INC74 citations95
US6037235AMar 14, 2000
Hydrogen anneal for curing defects of silicon/nitride interfaces of semiconductor devices
APPLIED MATERIALS INC52 citations95
US6677254B2Jan 13, 2004
Processes for making a barrier between a dielectric and a conductor and products produced therefrom
APPLIED MATERIALS INC46 citations90
US6573150B1Jun 3, 2003
Integration of CVD tantalum oxide with titanium nitride and tantalum nitride to form MIM capacitors
APPLIED MATERIALS INC23 citations85
US6218300B1Apr 17, 2001
Method and apparatus for forming a titanium doped tantalum pentaoxide dielectric layer using CVD
APPLIED MATERIALS INC15 citations82