Inventor
OHTSUKA KEN-ICHI
JP5 patents
Patents
5 patentsUS7285465B2Oct 23, 2007
Method of manufacturing a SiC vertical MOSFET
MITSUBISHI ELECTRIC CORP10 citations83
US7029969B2Apr 18, 2006
Method of manufacture of a silicon carbide MOSFET including a masking with a tapered shape and implanting ions at an angle
MITSUBISHI ELECTRIC CORP7 citations72
US5300190AApr 5, 1994
Process of producing diffraction grating
MITSUBISHI ELECTRIC CORP10 citations71
US8026160B2Sep 27, 2011
Semiconductor device and semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP2 citations61
US5540345AJul 30, 1996
Process of producing diffraction grating
MITSUBISHI ELECTRIC CORP1 citations49