Inventor
TAKAMI TETSUYA
JP6 patents
Patents
6 patentsUS5622567AApr 22, 1997
Thin film forming apparatus using laser
MITSUBISHI ELECTRIC CORP147 citations98
US6110291AAug 29, 2000
Thin film forming apparatus using laser
MITSUBISHI ELECTRIC CORP67 citations94
US6033741AMar 7, 2000
Thin film forming apparatus using laser
MITSUBISHI ELECTRIC CORP32 citations92
US7285465B2Oct 23, 2007
Method of manufacturing a SiC vertical MOSFET
MITSUBISHI ELECTRIC CORP10 citations83
US7029969B2Apr 18, 2006
Method of manufacture of a silicon carbide MOSFET including a masking with a tapered shape and implanting ions at an angle
MITSUBISHI ELECTRIC CORP7 citations72
US7829898B2Nov 9, 2010
Power semiconductor device having raised channel and manufacturing method thereof
MITSUBISHI ELECTRIC CORP1 citations51