Inventor

LEUSINK GERT J

US6 patents

⚠️ This page may combine multiple inventors who share the name “LEUSINK GERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

5 patents

US7067422B2Jun 27, 2006

Method of forming a tantalum-containing gate electrode structure

IBM23 citations92

US6989321B2Jan 24, 2006

Low-pressure deposition of metal layers from metal-carbonyl precursors

IBM41 citations92

US6924223B2Aug 2, 2005

Method of forming a metal layer using an intermittent precursor gas flow process

IBM32 citations91

US7078341B2Jul 18, 2006

Method of depositing metal layers from metal-carbonyl precursors

IBM12 citations84

US7189431B2Mar 13, 2007

Method for forming a passivated metal layer

IBM5 citations62

TOKYO ELECTRON LTD

1 patent

US9607888B2Mar 28, 2017

Integration of ALD barrier layer and CVD Ru liner for void-free Cu filling

TOKYO ELECTRON LTD2 citations71