Inventor
ATSUCHI KOTA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “ATSUCHI KOTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
5 patentsUS7771911B2Aug 10, 2010
Process for producing photoresist composition, filter, coater and photoresist composition
TOKYO OHKA KOGYO CO LTD7 citations69
US7276575B2Oct 2, 2007
Process for refining crude resin for resist
TOKYO OHKA KOGYO CO LTD1 citations49
US7879527B2Feb 1, 2011
Method of producing positive resist composition, positive resist composition, and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations48
US7312015B2Dec 25, 2007
Process for refining crude resin for electronic material
TOKYO OHKA KOGYO CO LTD1 citations48
US7972762B2Jul 5, 2011
Positive resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations39