Inventor · disambiguated record
Herman Itzkowitz
Also filed as: ITZKOWITZ HERMAN
6 granted patents·4 pending applications·188 citations·filing 1980–2019
83Inventor score
Files withITZKOWITZ HERMAN3SOLID STATE EQUIPMENT CORP3VEECO PRECISION SURFACE PROC LLC2EXXON RESEARCH ENGINEERING CO1VEECO PREC SURFACE PROC LLC1
Top patents by PatentIndex Score
10 records- 0193US6539952B2Megasonic treatment apparatusSOLID STATE EQUIPMENT CORP·Filed 2001·Granted Apr 1, 2003·77 cites·21 claims
- 0284US5675856AWafer scrubbing deviceSOLID STATE EQUIPMENT CORP·Filed 1996·Granted Oct 14, 1997·82 cites·20 claims
- 0359US4362980APosition error recovery and motor control systemEXXON RESEARCH ENGINEERING CO·Filed 1980·Granted Dec 7, 1982·19 cites·22 claims
- 0443US10022745B2Apparatus for dual speed spin chuckVEECO PRECISION SURFACE PROC LLC·Filed 2014·Granted Jul 17, 2018·0 cites·21 claims
- 0543US2008293253A1Wet etching of the edge and bevel of a silicon waferITZKOWITZ HERMAN·Filed 2008·Application pending·0 cites
- 0642USRE36767EWafer scrubbing deviceSOLID STATE EQUIPMENT CORP·Filed 1999·Granted Jul 11, 2000·10 cites·20 claims
- 0740US2007169792A1Apparatus and method of chemical separationITZKOWITZ HERMAN·Filed 2006·Application pending·0 cites
- 0840US2019385890A1Apparatus for supporting and maneuvering wafersVEECO PRECISION SURFACE PROC LLC·Filed 2019·Application pending·0 cites
- 0938US2006172538A1Wet etching the edge and bevel of a silicon waferITZKOWITZ HERMAN·Filed 2005·Application pending·0 cites
- 1037US9768041B2Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycleVEECO PREC SURFACE PROC LLC·Filed 2014·Granted Sep 19, 2017·0 cites·29 claims
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