Inventor
HAMANA HIROSHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “HAMANA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS9991134B2Jun 5, 2018
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC100 citations99
US9704723B2Jul 11, 2017
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC114 citations99
US9659792B2May 23, 2017
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC125 citations99
US9449850B2Sep 20, 2016
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC135 citations99
US9378969B2Jun 28, 2016
Low temperature gas-phase carbon removal
APPLIED MATERIALS INC529 citations99
US9184055B2Nov 10, 2015
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC181 citations99
US9153442B2Oct 6, 2015
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC220 citations99
US9093371B2Jul 28, 2015
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC184 citations99
US9023732B2May 5, 2015
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC187 citations99
US8975152B2Mar 10, 2015
Methods of reducing substrate dislocation during gapfill processing
APPLIED MATERIALS INC5 citations73
US8012887B2Sep 6, 2011
Precursor addition to silicon oxide CVD for improved low temperature gapfill
APPLIED MATERIALS INC0 citations51