Inventor
EIRIKSSON ARI
US8 patents
⚠️ This page may combine multiple inventors who share the name “EIRIKSSON ARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
5 patentsUS7952851B2May 31, 2011
Wafer grounding method for electrostatic clamps
AXCELIS TECH INC10 citations82
US7070661B2Jul 4, 2006
Uniform gas cushion wafer support
AXCELIS TECH INC18 citations82
US7026581B2Apr 11, 2006
Apparatus for positioning an elevator tube
AXCELIS TECH INC15 citations82
US7560705B2Jul 14, 2009
Workpiece handling scan arm for ion implantation system
AXCELIS TECH INC12 citations76
US7100759B2Sep 5, 2006
Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit
AXCELIS TECH INC0 citations33