Inventor
HAMAGUCHI HIROMITSU
JP11 patents
⚠️ This page may combine multiple inventors who share the name “HAMAGUCHI HIROMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KATAOKA YASUTO
3 patentsMATSUSHITA ELECTRIC INDUSTRIAL CO LTD
2 patentsUS5182718AJan 26, 1993
Method and apparatus for writing a pattern on a semiconductor sample based on a resist pattern corrected for proximity effects resulting from direct exposure of the sample by a charged-particle beam or light
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD107 citations96
US4998020AMar 5, 1991
Electron beam exposure evaluation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD19 citations73