Inventor
HORIGOME MASAHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “HORIGOME MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS9165771B2Oct 20, 2015
Pulsed gas plasma doping method and apparatus
TOKYO ELECTRON LTD3 citations61
US9029249B2May 12, 2015
Plasma doping apparatus and plasma doping method
TOKYO ELECTRON LTD0 citations51
US9472404B2Oct 18, 2016
Doping method, doping apparatus and method of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations41