Inventor
TABATA SHIN
JP5 patents
Patents
5 patentsUS10910511B2Feb 2, 2021
Manufacturing method of III-V compound crystal and manufacturing method of semiconductor device
DISCO CORP2 citations71
US9530929B2Dec 27, 2016
Lift-off method
DISCO CORP2 citations60
US12129570B2Oct 29, 2024
Manufacturing method of single-crystal silicon substrate
DISCO CORP0 citations49
US11618106B2Apr 4, 2023
Processing method and laser processing apparatus including imaging detector for SiC ingot
DISCO CORP0 citations49
US9511579B2Dec 6, 2016
Separation apparatus
DISCO CORP0 citations39