Inventor
OWADA TATSUSHI
JP3 patents
Patents
3 patentsUS6897130B2May 24, 2005
Method for thermal processing semiconductor wafer with a flash discharge lamp after preheating to a predetermined temperature
USHIO ELECTRIC INC14 citations78
US10061197B2Aug 28, 2018
Light irradiation device and method for patterning self assembled monolayer
USHIO ELECTRIC INC0 citations48
US9070526B2Jun 30, 2015
Light source device, light irradiating apparatus equipped with light source device, and method of patterning self-assembled monolayer using light irradiating apparatus
USHIO ELECTRIC INC0 citations48