Inventor

MURAKAMI HIRAKU

JP3 patents

Patents

3 patents

US10264630B2Apr 16, 2019

Plasma processing apparatus and method for processing object

TOKYO ELECTRON LTD2 citations69

US9818582B2Nov 14, 2017

Plasma processing method

TOKYO ELECTRON LTD1 citations48

US10553409B2Feb 4, 2020

Method of cleaning plasma processing apparatus

TOKYO ELECTRON LTD0 citations41