Inventor
HSIAO CHUN-WEN
TW9 patents
⚠️ This page may combine multiple inventors who share the name “HSIAO CHUN-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS10714395B2Jul 14, 2020
Fin isolation structure for FinFET and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations82
US11679469B2Jun 20, 2023
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12543365B2Feb 3, 2026
Fin isolation structure for FinFET and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11942373B2Mar 26, 2024
Fin isolation structure for FinFET and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11688644B2Jun 27, 2023
Fin isolation structure for FinFET and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10998239B2May 4, 2021
Fin isolation structure for FinFET and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12172263B2Dec 24, 2024
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11189727B2Nov 30, 2021
FinFET contacts and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59