Inventor
HONG SEONGCHUL
KR11 patents
⚠️ This page may combine multiple inventors who share the name “HONG SEONGCHUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS10754254B1Aug 25, 2020
Extreme ultraviolet (EUV) exposure apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD9 citations80
US12185450B2Dec 31, 2024
Semiconductor manufacturing apparatus and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations61
US11979973B2May 7, 2024
Semiconductor manufacturing apparatus and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations61
US11778719B2Oct 3, 2023
Laser beam delivery apparatus for extreme ultra violet light source
SAMSUNG ELECTRONICS CO LTD0 citations59
US11828952B2Nov 28, 2023
Light source and extreme ultraviolet light source system using the same
SAMSUNG ELECTRONICS CO LTD0 citations46
UNIV HANYANG IND UNIV COOP FOUND
3 patentsUS9958770B2May 1, 2018
Pellicle for EUV lithography
UNIV HANYANG IND UNIV COOP FOUND8 citations79
US11940726B2Mar 26, 2024
Mask protective module, pellicle having the same, and lithography apparatus having the same
UNIV HANYANG IND UNIV COOP FOUND0 citations60
US11402746B2Aug 2, 2022
Mask protective module, pellicle having the same, and lithography apparatus having the same
UNIV HANYANG IND UNIV COOP FOUND0 citations60