Inventor
BOYDSTON MARK R
US5 patents
Patents
5 patentsUS6375749B1Apr 23, 2002
Susceptorless semiconductor wafer support and reactor system for epitaxial layer growth
SEH AMERICA INC441 citations95
US6190453B1Feb 20, 2001
Growth of epitaxial semiconductor material with improved crystallographic properties
SEH AMERICA INC70 citations95
US6703290B2Mar 9, 2004
Growth of epitaxial semiconductor material with improved crystallographic properties
SEH AMERICA INC29 citations91
US5872017AFeb 16, 1999
In-situ epitaxial passivation for resistivity measurement
SEH AMERICA INC20 citations85
US6506667B2Jan 14, 2003
Growth of epitaxial semiconductor material with improved crystallographic properties
SEH AMERICA INC2 citations61