Inventor
NINOMIYA KEN
JP26 patents
Patents
26 patentsUS5412210AMay 2, 1995
Scanning electron microscope and method for production of semiconductor device by using the same
HITACHI LTD148 citations99
US4579623AApr 1, 1986
Method and apparatus for surface treatment by plasma
HITACHI LTD654 citations99
US5481109AJan 2, 1996
Surface analysis method and apparatus for carrying out the same
HITACHI LTD121 citations98
US4481229ANov 6, 1984
Method for growing silicon-including film by employing plasma deposition
HITACHI LTD143 citations97
US6114695ASep 5, 2000
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD62 citations96
US5969357AOct 19, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD43 citations96
US5866904AFeb 2, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD42 citations96
US5594245AJan 14, 1997
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD71 citations96
US4901667AFeb 20, 1990
Surface treatment apparatus
HITACHI LTD103 citations96
US4522674AJun 11, 1985
Surface treatment apparatus
HITACHI LTD71 citations96
US4462863AJul 31, 1984
Microwave plasma etching
HITACHI LTD59 citations95
US6387235B1May 14, 2002
Apparatus for the separation and fractionation of differentially expressed gene fragments
HITACHI LTD31 citations93
US5055679AOct 8, 1991
Surface analysis method and apparatus
HITACHI LTD31 citations93
US5877498AMar 2, 1999
Method and apparatus for X-ray analyses
HITACHI LTD42 citations92
US5594246AJan 14, 1997
Method and apparatus for x-ray analyses
HITACHI LTD21 citations92
US5220169AJun 15, 1993
Surface analyzing method and apparatus
HITACHI LTD28 citations92
US5138158AAug 11, 1992
Surface analysis method and apparatus
HITACHI LTD29 citations92
US5108543AApr 28, 1992
Method of surface treatment
HITACHI LTD36 citations92
US5028778AJul 2, 1991
Surface analysis method and a device therefor
HITACHI LTD23 citations92
US4705595ANov 10, 1987
Method for microwave plasma processing
HITACHI LTD32 citations92
US4658143AApr 14, 1987
Ion source
HITACHI LTD29 citations92
US4624214ANov 25, 1986
Dry-processing apparatus
HITACHI LTD30 citations92
US4559100ADec 17, 1985
Microwave plasma etching apparatus
HITACHI LTD43 citations92
US4433228AFeb 21, 1984
Microwave plasma source
HITACHI LTD43 citations92
US4844767AJul 4, 1989
Method of and apparatus for etching
HITACHI LTD25 citations89
US5115130AMay 19, 1992
Surface measuring method and apparatus
HITACHI LTD9 citations74