Inventor
PARANJPE AJIT P
US37 patents
⚠️ This page may combine multiple inventors who share the name “PARANJPE AJIT P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
18 patentsUS5580385ADec 3, 1996
Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber
TEXAS INSTRUMENTS INC149 citations99
US5494526AFeb 27, 1996
Method for cleaning semiconductor wafers using liquified gases
TEXAS INSTRUMENTS INC230 citations99
US5434107AJul 18, 1995
Method for planarization
TEXAS INSTRUMENTS INC145 citations99
US5231334AJul 27, 1993
Plasma source and method of manufacturing
TEXAS INSTRUMENTS INC124 citations99
US5217559AJun 8, 1993
Apparatus and method for in-situ deep ultraviolet photon-assisted semiconductor wafer processing
TEXAS INSTRUMENTS INC143 citations99
US5430355AJul 4, 1995
RF induction plasma source for plasma processing
TEXAS INSTRUMENTS INC121 citations98
US5591493AJan 7, 1997
Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber
TEXAS INSTRUMENTS INC49 citations96
US5435379AJul 25, 1995
Method and apparatus for low-temperature semiconductor processing
TEXAS INSTRUMENTS INC66 citations96
US5389153AFeb 14, 1995
Plasma processing system using surface wave plasma generating apparatus and method
TEXAS INSTRUMENTS INC59 citations95
US5501637AMar 26, 1996
Temperature sensor and method
TEXAS INSTRUMENTS INC72 citations94
US5361137ANov 1, 1994
Process control for submicron linewidth measurement
TEXAS INSTRUMENTS INC56 citations94
US6391754B1May 21, 2002
Method of making an integrated circuit interconnect
TEXAS INSTRUMENTS INC48 citations93
US5601366AFeb 11, 1997
Method for temperature measurement in rapid thermal process systems
TEXAS INSTRUMENTS INC42 citations93
US5593924AJan 14, 1997
Use of a capping layer to attain low titanium-silicide sheet resistance and uniform silicide thickness for sub-micron silicon and polysilicon lines
TEXAS INSTRUMENTS INC60 citations93
US5436528AJul 25, 1995
Plasma source employing spiral RF coil and method for using same
TEXAS INSTRUMENTS INC37 citations93
US5422723AJun 6, 1995
Diffraction gratings for submicron linewidth measurement
TEXAS INSTRUMENTS INC39 citations90
US5249865AOct 5, 1993
Interferometric temperature measurement system and method
TEXAS INSTRUMENTS INC18 citations74
US5888899AMar 30, 1999
Method for copper doping of aluminum films
TEXAS INSTRUMENTS INC2 citations63
CVC PRODUCTS INC
11 patentsUS6444263B1Sep 3, 2002
Method of chemical-vapor deposition of a material
CVC PRODUCTS INC108 citations98
US6294836B1Sep 25, 2001
Semiconductor chip interconnect barrier material and fabrication method
CVC PRODUCTS INC131 citations98
US6905578B1Jun 14, 2005
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure
CVC PRODUCTS INC102 citations97
US6365502B1Apr 2, 2002
Microelectronic interconnect material with adhesion promotion layer and fabrication method
CVC PRODUCTS INC153 citations97
US6812126B1Nov 2, 2004
Method for fabricating a semiconductor chip interconnect
CVC PRODUCTS INC48 citations96
US6204204B1Mar 20, 2001
Method and apparatus for depositing tantalum-based thin films with organmetallic precursor
CVC PRODUCTS INC60 citations96
US6645847B2Nov 11, 2003
Microelectronic interconnect material with adhesion promotion layer and fabrication method
CVC PRODUCTS INC47 citations95
US6627995B2Sep 30, 2003
Microelectronic interconnect material with adhesion promotion layer and fabrication method
CVC PRODUCTS INC59 citations95
US6596133B1Jul 22, 2003
Method and system for physically-assisted chemical-vapor deposition
CVC PRODUCTS INC46 citations93
US6461675B2Oct 8, 2002
Method for forming a copper film on a substrate
CVC PRODUCTS INC65 citations93
US6444103B1Sep 3, 2002
Method and apparatus for thin film deposition using an active shutter
CVC PRODUCTS INC15 citations84