Inventor
SMICK THEODORE H
US36 patents
⚠️ This page may combine multiple inventors who share the name “SMICK THEODORE H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS6437351B1Aug 20, 2002
Method and apparatus for controlling a workpiece in a vacuum chamber
APPLIED MATERIALS INC82 citations98
US6515288B1Feb 4, 2003
Vacuum bearing structure and a method of supporting a movable member
APPLIED MATERIALS INC74 citations96
US6163033ADec 19, 2000
Method and apparatus for controlling a workpiece in a vacuum chamber
APPLIED MATERIALS INC61 citations96
US6689221B2Feb 10, 2004
Cooling gas delivery system for a rotatable semiconductor substrate support assembly
APPLIED MATERIALS INC47 citations93
US6555832B1Apr 29, 2003
Determining beam alignment in ion implantation using Rutherford Back Scattering
APPLIED MATERIALS INC33 citations92
US6501078B1Dec 31, 2002
Ion extraction assembly
APPLIED MATERIALS INC51 citations92
US6331713B1Dec 18, 2001
Movable ion source assembly
APPLIED MATERIALS INC31 citations92
US6207959B1Mar 27, 2001
Ion implanter
APPLIED MATERIALS INC36 citations92
US6956223B2Oct 18, 2005
Multi-directional scanning of movable member and ion beam monitoring arrangement therefor
APPLIED MATERIALS INC24 citations91
US6903349B2Jun 7, 2005
Ion implanter and a method of implanting ions
APPLIED MATERIALS INC22 citations91
US6323496B1Nov 27, 2001
Apparatus for reducing distortion in fluid bearing surfaces
APPLIED MATERIALS INC12 citations74
US6274875B1Aug 14, 2001
Fluid bearing vacuum seal assembly
APPLIED MATERIALS INC10 citations74
US6271530B1Aug 7, 2001
Apparatus for reducing distortion in fluid bearing surfaces
APPLIED MATERIALS INC7 citations74
US6268609B1Jul 31, 2001
Apparatus and method for reducing heating of a workpiece in ion implantation
APPLIED MATERIALS INC8 citations74
US7582883B2Sep 1, 2009
Method of scanning a substrate in an ion implanter
APPLIED MATERIALS INC3 citations63
TWIN CREEKS TECHNOLOGIES INC
4 patentsUS7939812B2May 10, 2011
Ion source assembly for ion implantation apparatus and a method of generating ions therein
TWIN CREEKS TECHNOLOGIES INC23 citations92
US7989784B2Aug 2, 2011
Ion implantation apparatus and a method
TWIN CREEKS TECHNOLOGIES INC30 citations91
US8044374B2Oct 25, 2011
Ion implantation apparatus
TWIN CREEKS TECHNOLOGIES INC25 citations89
US7982197B2Jul 19, 2011
Ion implantation apparatus and a method for fluid cooling
TWIN CREEKS TECHNOLOGIES INC19 citations82
SMICK THEODORE H
3 patentsUS8101488B1Jan 24, 2012
Hydrogen implantation with reduced radiation
SMICK THEODORE H32 citations91
US8558486B2Oct 15, 2013
D. c. Charged particle accelerator, a method of accelerating charged particles using d. c. voltages and a high voltage power supply apparatus for use therewith
SMICK THEODORE H20 citations82
US8324599B2Dec 4, 2012
Ion implantation apparatus
SMICK THEODORE H16 citations80
NEUTRON THERAPEUTICS INC
3 patentsNEUTRON THERAPEUTICS LLC
3 patentsUS12484140B2Nov 25, 2025
Compact motor-driven insulated electrostatic particle accelerator
NEUTRON THERAPEUTICS LLC0 citations59
US11968774B2Apr 23, 2024
Compact motor-driven insulated electrostatic particle accelerator
NEUTRON THERAPEUTICS LLC0 citations59
US12062463B2Aug 13, 2024
Neutron target for boron neutron capture therapy
NEUTRON THERAPEUTICS LLC0 citations57