Inventor · disambiguated record
Tadaaki Shinozaki
Also filed as: SHINOZAKI TADAAKI
3 granted patents·73 citations·filing 1995–2000
74Inventor score
Files withNIKON CORP3
Top patents by PatentIndex Score
3 records- 0184US6288772B1Scanning exposure method and scanning type exposure apparatusNIKON CORP·Filed 2000·Granted Sep 11, 2001·28 cites·22 claims
- 0266US5995199APosition measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure maskNIKON CORP·Filed 1997·Granted Nov 30, 1999·28 cites·14 claims
- 0345US5532822AMethod of measuring orthogonality of stage unitNIKON CORP·Filed 1995·Granted Jul 2, 1996·17 cites·3 claims
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