Inventor
FUJIMORI NOBUTAKA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “FUJIMORI NOBUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS6204912B1Mar 20, 2001
Exposure method, exposure apparatus, and mask
NIKON CORP90 citations97
US5912726AJun 15, 1999
Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system
NIKON CORP47 citations92
US5973766AOct 26, 1999
Exposure method and exposure device
NIKON CORP34 citations91
US5995199ANov 30, 1999
Position measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure mask
NIKON CORP28 citations90
US5565988AOct 15, 1996
Alignment method and apparatus
NIKON CORP5 citations61
US6538724B1Mar 25, 2003
Exposure apparatus
NIKON CORP0 citations50