Inventor
MORIOKA TOSHINOBU
JP5 patents
Patents
5 patentsUS5973766AOct 26, 1999
Exposure method and exposure device
NIKON CORP34 citations91
US5995199ANov 30, 1999
Position measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure mask
NIKON CORP28 citations90
US6641981B1Nov 4, 2003
Exposure method, exposure apparatus, and device manufacturing method
NIKON CORP35 citations85
US6104471AAug 15, 2000
Exposure apparatus and method wherein the magnification of the projection optical system compensates for physical changes in the substrate
NIKON CORP19 citations81
US6512572B1Jan 28, 2003
Exposure apparatus, method, and storage medium
NIKON CORP8 citations71