Inventor
LU HSIAO-LING
TW8 patents
⚠️ This page may combine multiple inventors who share the name “LU HSIAO-LING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
7 patentsUS6251779B1Jun 26, 2001
Method of forming a self-aligned silicide on a semiconductor wafer
UNITED MICROELECTRONICS CORP28 citations92
US6235606B1May 22, 2001
Method of fabricating shallow trench isolation
UNITED MICROELECTRONICS CORP29 citations92
US6140192AOct 31, 2000
Method for fabricating semiconductor device
UNITED MICROELECTRONICS CORP30 citations92
US6913978B1Jul 5, 2005
Method for forming shallow trench isolation structure
UNITED MICROELECTRONICS CORP9 citations71
US6249138B1Jun 19, 2001
Method for testing leakage current caused self-aligned silicide
UNITED MICROELECTRONICS CORP13 citations71
US7294575B2Nov 13, 2007
Chemical mechanical polishing process for forming shallow trench isolation structure
UNITED MICROELECTRONICS CORP7 citations70
US7544305B2Jun 9, 2009
Chemical mechanical polishing process for forming shallow trench isolation structure
UNITED MICROELECTRONICS CORP2 citations61